Northwestern University

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Filtering by: Type Work Keyword atomic layer deposition Keyword van der Waals epitaxy

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Engineering Scalable Processes and Interfaces for 2D Electronic Devices

Description:

Scalable processing of well-defined interfaces is key not only for wider application of two-dimensional (2D) materials in technology but also for improved fundamental understanding. Atomic layer deposition has useful characteristics, especially self-limited growth at low temperatures, that make it well suited for the production of uniform interfaces. Related processes, such...

Keyword:

van der Waals epitaxy, 2D material, and atomic layer deposition

Subject:

Nanotechnology and Materials Science

Creator:

Moody, Michael

Owner:

Scholarly Digital Publishing

Language:

en

Date Uploaded:

06/22/2022

Date Created:

2022-01-01

Resource Type:

Dissertation

Alternate Identifier:

etdadmin_upload_889957 and http://dissertations.umi.com/northwestern:15979