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Filtering by: Creator Moody, Michael Keyword atomic layer deposition Keyword van der Waals epitaxy

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Description:: Scalable processing of well-defined interfaces is key not only for wider application of two-dimensional (2D) materials in technology but also for improved fundamental understanding. Atomic layer deposition has useful characteristics, especially self-limited growth at low temperatures, that make it well suited for the production of uniform interfaces. Related processes, such...
Keyword:: van der Waals epitaxy, 2D material, and atomic layer deposition
Subject:: Nanotechnology and Materials Science
Creator:: Moody, Michael
Owner:: Scholarly Digital Publishing
Language:: en
Date Uploaded:: 06/22/2022
Date Created:: 2022-01-01
Resource Type:: Dissertation
Alternate Identifier:: etdadmin_upload_889957 and http://dissertations.umi.com/northwestern:15979

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